Centers and Institutes   |
Synthesis and development of nanostructured materials and composites, with applications in hydrogen fuel systems, solar energy conversion, and biotechnology. Novel growth methods for carbon nanotubes.
Worsley, M. A., S. F. Bent, N. C. M. Fuller, T. L. Tai, J. Doyle, M. Rothwell, and T. J. Dalton "Effect of Species Density and Ion Scattering during Ashing on Ultra low- Inter-Level Dielectric Films," J. Appl. Phys. 100, in press (2006).
Worsley, M. A., S. F. Bent, and N. C. M. Fuller, "Characterization of Neutral Species Density in a Dual-Frequency Capacitively-Coupled Reactor by Optical Emission Actinometry," J. Appl. Phys. 100, 083301 (2006).
Fuller, N. C. M., M. A. Worsley, C. Labelle, T. Dalton, T. L. Tai, P. Flaitz, D. Dunn, S. Bent, and C. Tweedie, "Plasma Induced Dielectric Modification: Etching Challenges for 65 nm and Beyond Technology Nodes," Proc. of the ECS 2005 International Semiconductor Technology Conference, Shanghai, China, p. 299, March 15-17, 2005.
Worsley, M. A., M. Roberts, S. F. Bent, S. Gates, T. Shaw, W. Volksen, and R. D. Miller, "Detection of Open or Closed Porosity in Low-Dielectrics by Solvent Diffusion," Microelectronics Engineering 82, 113 (2005).
Worsley, M. A., S. F. Bent, S. Gates, N. C. M. Fuller, W. Volksen, M. Steen, and T. Dalton, "Effect of Plasma Interactions with Low-Films as a Function of Porosity, Plasma Chemistry, and Temperature," J. Vac. Sci. Technol. B 23, 395 (2005).
Worsley, M. A., S. Bent, S. Gates, K. Kumar, T. Dalton, and J. Hedrick, "The Study of Modified Layers in SiCOH Dielectrics Using Spectroscopic Ellipsometry," Mater. Res. Soc. Symp. Proc. 766, E3.29 (2003).